![Industrial Project](/fileadmin/_processed_/a/5/csm_industrial-project_0a2104167a.jpg)
EUV Lithography Control System
EMCOMO supplies MicroTCA systems with CPU, FPGA and multiple SRIO channels
![EUV Lithography Control System EUV Lithography Control System](/fileadmin/_processed_/4/3/csm_EUV_Laser_Control_a0d52a1b19.png)
The EUV Lithography Control System is used for optical lithography control applications in the semiconductor industry.
The system is based on the following components:
- 5U 19" MTCA.4 system with 12 full-size single-width AMC slots
- dual redundant universal 110-240V AC power modules with 1.000W each
- MCH with PCIe Gen.3 fabric switch and MCH with SRIO fabric switch
- Intel Xeon processor with 2TB SSD, PCIe Gen.3 and SRIO fabric interface
- Intel Arria-10 FPGA FMC carrier board for customer specific FMC module
- Up to 4 QSFP+/SFP+ carrier boards to connect external SRIO devices
- Interface board with 4x USB 3.0 to connect external USB 3.0 devices
EMCOMO services:
- System design, integration and test
For more information, please contact info@emcomo.de